Invention Grant
- Patent Title: Supporting substrate for composite substrate and composite substrate
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Application No.: US14925095Application Date: 2015-10-28
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Publication No.: US10332958B2Publication Date: 2019-06-25
- Inventor: Jun Yoshikawa , Mikiya Ichimura , Katsuhiro Imai
- Applicant: NGK Insulators, Ltd.
- Applicant Address: JP Nagoya
- Assignee: NGK Insulators, Ltd.
- Current Assignee: NGK Insulators, Ltd.
- Current Assignee Address: JP Nagoya
- Agency: Burr & Brown, PLLC
- Priority: JP2013-115308 20130531
- Main IPC: H01L29/06
- IPC: H01L29/06 ; C04B35/111 ; H01L29/20 ; B32B9/04 ; C04B35/453 ; C04B37/00 ; H03H9/02 ; B32B9/00 ; H01L29/16 ; H01L41/08 ; B32B7/12 ; B32B5/02 ; B32B5/18 ; B32B15/04 ; B32B15/20 ; H01L41/312 ; H01L41/313 ; H01L33/00
Abstract:
A supporting substrate for a composite substrate comprises a ceramic and has a polished surface for use in bonding. An orientation degree of the ceramic forming the supporting substrate at the polished surface is 50% or higher, and an aspect ratio of each crystal grain included in the supporting substrate is 5.0 or less.
Public/Granted literature
- US20160049469A1 SUPPORTING SUBSTRATE FOR COMPOSITE SUBSTRATE AND COMPOSITE SUBSTRATE Public/Granted day:2016-02-18
Information query
IPC分类:
