Invention Grant
- Patent Title: Carbon nanotube transistor with carrier blocking using thin dielectric under contact
-
Application No.: US15838487Application Date: 2017-12-12
-
Publication No.: US10333088B1Publication Date: 2019-06-25
- Inventor: Damon Brooks Farmer , Shu-Jen Han , Jianshi Tang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Amin, Turocy & Watson, LLP
- Main IPC: H01L29/08
- IPC: H01L29/08 ; H01L51/05 ; C01B32/168 ; H01L51/00 ; H01L21/04 ; H01L21/20 ; H01L27/28

Abstract:
The subject embodiments relate to carbon nanotube (CNT) transistors with carrier blocking using thin dielectric under the drain or source and drain contacts. According to an embodiment, a transistor is provided that comprises a CNT channel layer, a metal source contact formed on the carbon nanotube channel layer, and a metal drain contact formed on the carbon nanotube channel layer. The transistor structure further comprises a drain dielectric layer formed adjacent to and between a lower surface of the metal drain contact and an upper surface of the carbon nanotube channel layer. In one or more implementations, the drain dielectric layer comprises a material that suppresses injection of a first type of carrier into the CNT channel layer and facilitates the injection of a second type of carrier into the CNT channel layer.
Public/Granted literature
- US20190181367A1 CARBON NANOTUBE TRANSISTOR WITH CARRIER BLOCKING USING THIN DIELECTRIC UNDER CONTACT Public/Granted day:2019-06-13
Information query
IPC分类: