Invention Grant
- Patent Title: Laser ablation of accelerometer proof mass
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Application No.: US15222671Application Date: 2016-07-28
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Publication No.: US10335897B2Publication Date: 2019-07-02
- Inventor: William Goodman
- Applicant: William Goodman
- Applicant Address: US CA Mountain View
- Assignee: Applied Physics, Inc.
- Current Assignee: Applied Physics, Inc.
- Current Assignee Address: US CA Mountain View
- Agency: Tran & Associates
- Main IPC: B23K26/0622
- IPC: B23K26/0622 ; G01P15/125 ; B23K26/361 ; B23K26/402 ; G01P15/08 ; B23K103/00

Abstract:
A system for producing a proof-mass assembly includes a translation stage to receive a flapper hingedly supported by a bifilar flexure that extends radially inwardly from a support ring, wherein the bifilar flexure comprises a pair of flexure arms spaced apart by an opening or window; and a femtosecond laser optically coupled to the translation stage with focusing optics, the femtosecond laser applying a laser beam on the flexure arms over a plurality of passes to gradually thin the bifilar flexure regions, the laser periodically reducing a laser output to minimize damage from laser scanning and maximize bifilar flexure strength until the bifilar flexure reaches a predetermined thickness.
Public/Granted literature
- US20180029160A1 LASER ABLATION OF ACCELEROMETER PROOF MASS Public/Granted day:2018-02-01
Information query
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