Invention Grant
- Patent Title: Integrated micro actuator and LVDT for high precision position measurements
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Application No.: US15377458Application Date: 2016-12-13
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Publication No.: US10337890B2Publication Date: 2019-07-02
- Inventor: Roger Carlos Proksch , Dan Bocek , Jason Cleveland , Matthew Longmire , Matthew Klonowski
- Applicant: Oxford Instruments PLC , Oxford Instruments AFM Inc
- Applicant Address: US CA Pleasanton
- Assignee: Oxford Instruments AFM Inc
- Current Assignee: Oxford Instruments AFM Inc
- Current Assignee Address: US CA Pleasanton
- Agency: Law Office of Scott C Harris, Inc
- Main IPC: G01B7/14
- IPC: G01B7/14 ; G01D5/22 ; G01Q10/04 ; H01F21/04

Abstract:
A single housing with a non-ferromagnetic piezo-driven flexure has primary and secondary coil forms of different diameters, one coaxially inside the other, integrated in the flexure. The cylinders defining the planes of the primary and secondaries do not spatially overlap. The secondary coil forms may be wound in opposite directions and wired to provide a transformer device. Movement of the primary relative to the secondaries in the direction of the central axis of the coils can be differentially detected with high precision.
Public/Granted literature
- US20170089733A1 Integrated Micro Actuator and LVDT for High Precision Position Measurements Public/Granted day:2017-03-30
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