Invention Grant
- Patent Title: Method of producing film
-
Application No.: US14909857Application Date: 2014-09-05
-
Publication No.: US10338467B2Publication Date: 2019-07-02
- Inventor: Toshiki Ito , Takeshi Honma , Shiori Yonezawa , Youji Kawasaki
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Venable LLP
- Priority: JP2013-192965 20130918; JP2014-035124 20140226
- International Application: PCT/JP2014/074152 WO 20140905
- International Announcement: WO2015/041154 WO 20150326
- Main IPC: G03F7/031
- IPC: G03F7/031 ; H05K3/00 ; G03F7/00 ; H05K3/10 ; G03F7/027 ; G03F7/029 ; C08F222/10

Abstract:
A method of producing a film includes: a disposing step of disposing a photocurable composition on a substrate; a mold contact step of bringing the photocurable composition and a mold into contact with each other; a photoirradiation step of irradiating the photocurable composition with light to form a cured product; and a mold release step of releasing the cured product and the mold from each other, in which the method further includes an alignment step of aligning the mold and the substrate with each other before the photoirradiation step, in which the photocurable composition contains at least a polymerizable compound serving as a component (A) and a photopolymerization initiator serving as a component (B), and in which the polymerizable compound has a polymerization conversion ratio of 50% or more when exposed to light under conditions of an illuminance of 0.12 mW/cm2 and an exposure time of 11.0 seconds.
Public/Granted literature
Information query
IPC分类: