Invention Grant
- Patent Title: Spatial light modulator, method of driving same, and exposure method and apparatus
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Application No.: US16032829Application Date: 2018-07-11
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Publication No.: US10338479B2Publication Date: 2019-07-02
- Inventor: Yoji Watanabe , Soichi Owa , Tomoharu Fujiwara
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP2010-277530 20101213
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G02B26/06 ; G02B26/08

Abstract:
A method of driving a spatial light modulator includes: setting, in an array of mirror elements, mirror elements in a first state for turning incident light into reflected light with the same phase as that of the incident light or with a phase different by a first phase from that of the incident light and mirror elements in a second state for turning incident light into reflected light with a phase different approximately 180° from the first phase to an arrangement with a first phase distribution; and setting, in the array of mirror elements, the first mirror elements and the second mirror elements to an arrangement with a second phase distribution which is an inversion of the first phase distribution.
Public/Granted literature
- US20190049857A1 SPATIAL LIGHT MODULATOR, METHOD OF DRIVING SAME, AND EXPOSURE METHOD AND APPARATUS Public/Granted day:2019-02-14
Information query
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