- Patent Title: Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method
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Application No.: US15961061Application Date: 2018-04-24
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Publication No.: US10338482B2Publication Date: 2019-07-02
- Inventor: Yuichi Shibazaki
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2006-237045 20060831; JP2006-237491 20060901; JP2006-237606 20060901
- Main IPC: G03B27/58
- IPC: G03B27/58 ; G03F7/20 ; G03F9/00

Abstract:
In an exposure operation, as a second stage is moved in a direction parallel to a predetermined plane, another head different from a plurality of heads faces a grating section instead of one head of the plurality of heads, and positional information of the second stage is measured by multiple heads including remaining heads and the another head, the remaining heads excluding the one head of the plurality of heads, and correction information is acquired for the positional information obtained from the another head, based on the positional information obtained from the plurality of heads including the one head.
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