Invention Grant
- Patent Title: Adaptive high sigma yield prediction
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Application No.: US14967184Application Date: 2015-12-11
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Publication No.: US10339240B2Publication Date: 2019-07-02
- Inventor: Bruce W. McGaughy , Yutao Ma
- Applicant: ProPlus Design Solutions, Inc.
- Main IPC: G06F11/00
- IPC: G06F11/00 ; G06F17/50

Abstract:
Methods and systems are disclosed for determining a yield of a circuit in semiconductor manufacturing. In one embodiment, a computer implemented method includes performing a first pass of Monte Carlo simulations of the circuit to identify a plurality of failed sampling points in a high sigma region of a statistical distribution, partitioning the plurality of failed sampling points into a plurality of clusters based on angular separation of the plurality of failed sampling points, determining a boundary of each cluster in the plurality of clusters, performing sensitivity analysis from the boundary of the each cluster to identify an estimated closest failed sampling point associated with the each cluster, and performing a second pass of Monte Carlo simulations of the circuit to determine the yield of the circuit using the estimated closest failed sampling point associated with the each cluster and the boundary of each cluster in the plurality of clusters.
Public/Granted literature
- US20170169147A1 Adaptive High Sigma Yield Prediction Public/Granted day:2017-06-15
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