Invention Grant
- Patent Title: Mini-environment apparatus
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Application No.: US15377393Application Date: 2016-12-13
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Publication No.: US10340157B2Publication Date: 2019-07-02
- Inventor: Tsutomu Okabe , Hidetoshi Horibe
- Applicant: TDK CORPORATION
- Applicant Address: JP Tokyo
- Assignee: TDK CORPORATION
- Current Assignee: TDK CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2015-243275 20151214
- Main IPC: H01L21/67
- IPC: H01L21/67 ; F24F3/16 ; H01L21/673 ; H01L21/677 ; H01L21/687

Abstract:
A mini-environment apparatus includes a wafer transportation machine transporting a wafer, a wafer transportation room having the machine and passed by the wafer transported to a processing room, a circulating passage where a gas detoured from the transportation room flows, a blowing means forming a circulating current falling in the transportation room and rising in the passage, a current member arranged in a ceiling part of the transportation room and laminarizing the current and introducing this laminarized current into the transportation room, a particle removal filter arranged in either the ceiling part of the transportation room or the passage, and a chemical filter arranged in the passage detachably and separately from the removal filter. The chemical filter is arranged at a position lower than a lowest position where the wafer may pass through in the transportation room.
Public/Granted literature
- US20170170033A1 MINI-ENVIRONMENT APPARATUS Public/Granted day:2017-06-15
Information query
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