Invention Grant
- Patent Title: Crystal substrate, ultraviolet light-emitting device, and manufacturing methods therefor
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Application No.: US15442554Application Date: 2017-02-24
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Publication No.: US10340416B2Publication Date: 2019-07-02
- Inventor: Masafumi Jo , Hideki Hirayama
- Applicant: RIKEN
- Applicant Address: JP Saitama
- Assignee: RIKEN
- Current Assignee: RIKEN
- Current Assignee Address: JP Saitama
- Agency: Seed IP Law Group LLP
- Priority: JP2016-036463 20160226; JP2017-024585 20170214
- Main IPC: H01L33/12
- IPC: H01L33/12 ; H01L33/22 ; H01L33/18 ; H01L33/00

Abstract:
To fabricate a practically useful non-polar AlN buffer layer on a sapphire crystal plate and manufacture a UV light-emitting device on a non-polar crystal substrate by adopting the crystal substrate as an example, an embodiment of the present invention provides a crystal substrate 1D comprising an r-plane sapphire crystal plate 10 and an AlN buffer layer 20D of non-polar orientation. The AlN buffer layer comprises a surface protection layer 22 and a smoothing layer 26. The surface protection layer suppresses roughness increase on a surface of the AlN buffer layer, and the smoothing layer makes the surface of the AlN buffer layer a smoothed surface. Also provided is a crystal substrate 11 comprising an AlN buffer layer 20T to which a dislocation blocking layer 24 for reducing crystallographic defects is added between the surface protection layer 22 and the smoothing layer 26. In another embodiment a deep UV light-emitting device is provided.
Public/Granted literature
- US20170250308A1 CRYSTAL SUBSTRATE, ULTRAVIOLET LIGHT-EMITTING DEVICE, AND MANUFACTURING METHODS THEREFOR Public/Granted day:2017-08-31
Information query
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