Invention Grant
- Patent Title: Actuator, shutter device, fluid control device, switch, and two-dimensional scanning sensor device
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Application No.: US14910622Application Date: 2014-07-30
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Publication No.: US10340818B2Publication Date: 2019-07-02
- Inventor: Masato Suzuki , Akito Mori , Gen Hashiguchi , Tatsuhiko Sugiyama , Hiroshi Imamoto , Masatoshi Oba , Hiroyuki Mitsuya , Hisayuki Ashizawa , Kazunori Ishibashi
- Applicant: National University Corporation Shizuoka University , OMRON Corporation , KABUSHIKI KAISHA SAGINOMIYA SEISAKUSHO
- Applicant Address: JP Shizuoka-shi JP Kyoto-Shi JP Tokyo
- Assignee: National University Corporation Shizuoka University,OMRON Corporation,KABUSHIKI KAISHA SAGINOMIYA SEISAKUSHO
- Current Assignee: National University Corporation Shizuoka University,OMRON Corporation,KABUSHIKI KAISHA SAGINOMIYA SEISAKUSHO
- Current Assignee Address: JP Shizuoka-shi JP Kyoto-Shi JP Tokyo
- Agency: Crowell & Moring LLP
- Priority: JP2013-165166 20130808
- International Application: PCT/JP2014/070072 WO 20140730
- International Announcement: WO2015/019919 WO 20150212
- Main IPC: H02N1/00
- IPC: H02N1/00 ; F16K31/02 ; G02B26/02 ; H01H59/00 ; B81B3/00

Abstract:
An actuator includes: an electrostatic actuation mechanism including a stationary electrode and a movable electrode; a first movable part driven by the electrostatic actuation mechanism; a first elastic support part that elastically supports the first movable part; an electret formed in at least one of the stationary electrode and the movable electrode; and a drive control unit that controls application of voltage to the electrostatic actuation mechanism. In the actuator a plurality of stable states are set in which the first movable part is positioned at a stable position at which an electrostatic force generated by the electret matches with an elastic force exerted by the first elastic support part or at a stable position near such stable position. By applying a voltage to the electrostatic actuation mechanism, the first movable part may be displaced from any stable position to another stable position.
Public/Granted literature
- US20160204716A1 Actuator, Shutter Device, Fluid Control Device, Switch, and Two-Dimensional Scanning Sensor Device Public/Granted day:2016-07-14
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