Invention Grant
- Patent Title: Grinding apparatus
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Application No.: US15655964Application Date: 2017-07-21
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Publication No.: US10343248B2Publication Date: 2019-07-09
- Inventor: Hiroki Miyamoto
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Disco Corporation
- Current Assignee: Disco Corporation
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain, Ltd.
- Priority: JP2016-144144 20160722
- Main IPC: B24B57/00
- IPC: B24B57/00 ; B24B55/12 ; B24B37/30 ; B24B7/22 ; B24B41/06 ; B24B47/06 ; B24B47/08 ; B24B49/10 ; B24B55/02

Abstract:
A grinding apparatus includes a holding unit including a holding table having a holder for holding a workpiece and a grinding water suction part for drawing in grinding water outside of the holder, a rotational shaft having an end fixed centrally to a bottom surface of the holding table, a tubular rotary joint surrounding the rotational shaft, and a motor rotating the rotational shaft about its own axis. The rotational shaft has a first suction channel held in fluid communication with the holder of the holding table and a second suction channel held in fluid communication with the grinding water suction part. The rotary joint has a communication channel by which the first suction channel and the second suction channel are held in fluid communication with at least a suction source.
Public/Granted literature
- US20180021911A1 GRINDING APPARATUS Public/Granted day:2018-01-25
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