Invention Grant
- Patent Title: Wafer grinding device
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Application No.: US15110405Application Date: 2014-06-09
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Publication No.: US10343257B2Publication Date: 2019-07-09
- Inventor: Jun-Young Jang
- Applicant: LG SILTRON INC.
- Applicant Address: KR
- Assignee: SK Siltron Co., Ltd.
- Current Assignee: SK Siltron Co., Ltd.
- Current Assignee Address: KR
- Agency: Lewis Roca Rothgerber Christie LLP
- Priority: KR10-2014-0004854 20140115
- International Application: PCT/KR2014/005048 WO 20140609
- International Announcement: WO2015/108252 WO 20150723
- Main IPC: B24B55/02
- IPC: B24B55/02 ; B24B7/22 ; B24D7/10 ; B24D13/18

Abstract:
The present disclosure provides a wafer grinding device comprising: a chuck table to suction the wafer thereon, a grinding wheel to grind the wafer by a predetermined thickness, wherein the grinding wheel includes a grinding body, and grinding teeth arranged along and on a bottom outer periphery of the grinding body, wherein the grinding teeth are segmented; and a cooling unit at least partially extending along a region between a departure point of the grinding teeth from the wafer during rotation of the teeth, and a re-encounter point of the teeth with the wafer during rotation of the teeth, wherein the region extends along rotation path of the grinding teeth.
Public/Granted literature
- US20160318152A1 WAFER GRINDING DEVICE Public/Granted day:2016-11-03
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