Invention Grant
- Patent Title: End effector
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Application No.: US15875708Application Date: 2018-01-19
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Publication No.: US10343292B2Publication Date: 2019-07-09
- Inventor: Bernhard Bogner
- Applicant: SUSS MicroTec Lithography GmbH
- Applicant Address: DE
- Assignee: SUSS MICROTEC LITHOGRAPHY GMBH
- Current Assignee: SUSS MICROTEC LITHOGRAPHY GMBH
- Current Assignee Address: DE
- Agency: Hayes Soloway P.C.
- Priority: NL2018244 20170127
- Main IPC: B25J15/06
- IPC: B25J15/06 ; H01L21/683 ; H01L21/687 ; B32B15/04 ; G03F7/20 ; B25J15/00
Abstract:
An end effector for holding substrates has a multi-layered main body and a fluid channel which is provided in the main body. The main body has a receiving end and a fastening end, and include at least two layers, wherein at least one of the layers is not inherently stable, and is formed from a synthetic material film.
Public/Granted literature
- US20180215048A1 END EFFECTOR Public/Granted day:2018-08-02
Information query
