Invention Grant
- Patent Title: MEMS device and process
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Application No.: US15676430Application Date: 2017-08-14
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Publication No.: US10343894B2Publication Date: 2019-07-09
- Inventor: Stephen Duffy , Colin Robert Jenkins , Tsjerk Hans Hoekstra
- Applicant: Cirrus Logic International Semiconductor Ltd.
- Applicant Address: US TX Austin
- Assignee: Cirrus Logic, Inc.
- Current Assignee: Cirrus Logic, Inc.
- Current Assignee Address: US TX Austin
- Agency: Jackson Walker L.L.P.
- Priority: GB1616862.7 20161004
- Main IPC: H04R19/00
- IPC: H04R19/00 ; B81B3/00 ; B81C1/00 ; H04R7/06 ; H04R19/04
Abstract:
The application describes a MEMS transducer comprising a layer of conductive material provided on a surface of a layer of membrane material. The layer of conductive material comprises first and second regions, wherein the thickness and/or the conductivity of the/each first and second regions is different.
Public/Granted literature
- US20180050900A1 MEMS DEVICE AND PROCESS Public/Granted day:2018-02-22
Information query
