Invention Grant
- Patent Title: MEMS transducer having stress diffusing structures provided in a flexible membrane
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Application No.: US15543492Application Date: 2016-01-25
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Publication No.: US10343901B2Publication Date: 2019-07-09
- Inventor: Scott Lyall Cargill , Colin Robert Jenkins , Euan James Boyd , Richard Ian Laming
- Applicant: Cirrus Logic International Semiconductor Ltd.
- Applicant Address: US TX Austin
- Assignee: Cirrus Logic, Inc.
- Current Assignee: Cirrus Logic, Inc.
- Current Assignee Address: US TX Austin
- Agency: Jackson Walker L.L.P.
- International Application: PCT/EP2016/051462 WO 20160125
- International Announcement: WO2016/120214 WO 20160804
- Main IPC: B81C1/00
- IPC: B81C1/00 ; H04R19/00 ; H04R19/04 ; B81B3/00
Abstract:
The application describes MEMS transducer having a flexible membrane and which seeks to alleviate and/or redistribute stresses within the membrane layer. A membrane having a first/active region and a second/inactive region is described.
Public/Granted literature
- US20180002168A1 MEMS DEVICES AND PROCESSES Public/Granted day:2018-01-04
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