Invention Grant
- Patent Title: Ultraviolet light activated oxidation process for the reduction of organic carbon in semiconductor process water
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Application No.: US14169928Application Date: 2014-01-31
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Publication No.: US10343939B2Publication Date: 2019-07-09
- Inventor: Steve D. Sitkiewitz , Gary M. Carmignani , Lee W. Frederick
- Applicant: Evoqua Water Technologies LLC
- Applicant Address: US PA Pittsburgh
- Assignee: Evoqua Water Technologies LLC
- Current Assignee: Evoqua Water Technologies LLC
- Current Assignee Address: US PA Pittsburgh
- Main IPC: C02F1/00
- IPC: C02F1/00 ; C02F1/72 ; C02F1/20 ; C02F1/42 ; C02F1/469 ; C02F1/32 ; C02F1/44 ; C02F1/66 ; C02F103/04 ; C02F103/34
Abstract:
In a system for decomposing organic compounds in water for use in semiconductor manufacturing, a chemical reactor vessel having a fluid inlet and a fluid outlet, a persulfate anion addition system upstream of the reactor vessel, and a light emitting device contained within the reactor vessel. The light emitting device provides light capable of decomposing persulfate anions.
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