Invention Grant
- Patent Title: Depositing apparatus and method for manufacturing organic light emitting diode display using the same
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Application No.: US13965297Application Date: 2013-08-13
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Publication No.: US10344372B2Publication Date: 2019-07-09
- Inventor: Sang-Shin Lee
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si, Gyeonggi-do
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin-si, Gyeonggi-do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2012-0113500 20121012
- Main IPC: C23C14/24
- IPC: C23C14/24 ; H01L51/56 ; H01L21/67 ; H01L51/00 ; C23C14/12 ; C23C14/22

Abstract:
A deposition apparatus includes a deposition source containing a deposition material, the deposition source including a center area between two outer areas along a first direction, and a plurality of spray nozzles arranged on the center area of the deposition source along the first direction, the plurality of spray nozzles being configured to spray the deposition material toward a surface substrate, wherein the spray nozzles include first and second spray nozzles, the first spray nozzles having terminal ends thereof parallel to and facing the surface of the substrate, and the second spray nozzles having terminal ends thereof at an oblique angle with respect to the surface of the substrate.
Public/Granted literature
- US20180212203A9 DEPOSITING APPARATUS AND METHOD FOR MANUFACTURING ORGANIC LIGHT EMITTING DIODE DISPLAY USING THE SAME Public/Granted day:2018-07-26
Information query
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