Invention Grant
- Patent Title: Furnace for seeded sublimation of wide band gap crystals
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Application No.: US15548082Application Date: 2016-01-29
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Publication No.: US10344396B2Publication Date: 2019-07-09
- Inventor: Mark Loboda
- Applicant: Dow Corning Corporation
- Applicant Address: US MI Midland
- Assignee: DOW SILICONES CORPORATION
- Current Assignee: DOW SILICONES CORPORATION
- Current Assignee Address: US MI Midland
- Agency: Womble Bond Dickinson (US) LLP
- Agent Joseph Bach, Esq.
- International Application: PCT/US2016/015773 WO 20160129
- International Announcement: WO2016/126554 WO 20160811
- Main IPC: C30B23/06
- IPC: C30B23/06 ; C30B29/36 ; C30B30/04 ; C30B30/00

Abstract:
An apparatus for physical vapor transport growth of semiconductor crystals having a cylindrical vacuum enclosure defining an axis of symmetry; a reaction-cell support for supporting a reaction cell inside the vacuum enclosure; a cylindrical reaction cell made of material that is transparent to RF energy and having a height Hcell defined along the axis of symmetry; an RF coil provided around exterior of the vacuum enclosure and axially centered about the axis of symmetry, wherein the RF coil is configured to generate a uniform RF field along at least the height Hcell; and, an insulation configured for generating thermal gradient inside the reaction cell along the axis of symmetry. The ratio of height of the RF induction coil, measured along the axis of symmetry, to the height Hcell may range from 2.5 to 4.0 or from 2.8 to 4.0.
Public/Granted literature
- US20180002828A1 FURNACE FOR SEEDED SUBLIMATION OF WIDE BAND GAP CRYSTALS Public/Granted day:2018-01-04
Information query
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