Invention Grant
- Patent Title: Temperature control device and turbo-molecular pump
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Application No.: US15392524Application Date: 2016-12-28
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Publication No.: US10344770B2Publication Date: 2019-07-09
- Inventor: Junichiro Kozaki
- Applicant: Shimadzu Corporation
- Applicant Address: JP Kyoto
- Assignee: Shimadzu Corporation
- Current Assignee: Shimadzu Corporation
- Current Assignee Address: JP Kyoto
- Agency: Renner, Otto, Boisselle & Sklar, LLP
- Priority: JP2016-050292 20160314
- Main IPC: F04D19/04
- IPC: F04D19/04 ; F04D29/32 ; F04D27/00 ; F04D29/58 ; F04D27/02

Abstract:
A turbo-molecular pump includes a stator provided at a pump base portion, a rotor rotatably driven on the stator, a heating section configured to heat the pump base portion, abase temperature detection section configured to detect a temperature of the pump base portion, and a rotor temperature detection section configured to detect a temperature equivalent as a physical amount equivalent to a temperature of the rotor. A temperature control device of the turbo-molecular pump comprises: a heating control section configured to control heating of the pump base portion by the heating section based on a detection value of the rotor temperature detection section; and an informing section configured to inform a warning when a detection temperature of the base temperature detection section is equal to or lower than a predetermined threshold.
Public/Granted literature
- US20170260999A1 TEMPERATURE CONTROL DEVICE AND TURBO-MOLECULAR PUMP Public/Granted day:2017-09-14
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