Invention Grant
- Patent Title: Dynamic pressure sensor with improved operation
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Application No.: US15536779Application Date: 2015-12-18
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Publication No.: US10345176B2Publication Date: 2019-07-09
- Inventor: Bruno Fain , Philippe Robert , Thierry Verdot
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1462718 20141218
- International Application: PCT/EP2015/080511 WO 20151218
- International Announcement: WO2016/097302 WO 20160623
- Main IPC: G01L9/00
- IPC: G01L9/00 ; G01L23/08 ; H04R17/02 ; H04R19/00 ; H04R19/04 ; H04R1/38 ; G01L9/12

Abstract:
A MEMS and/or NEMS pressure sensor including, in a substrate: a stationary portion and a portion movable relative to the stationary portion, the movable portion including a sensitive element configured to move in the plane of the sensor under effect of a pressure variation; a stress gauge detecting movement of the sensitive element in the plane of the sensor due to the pressure variation; electrodes actuating the sensitive element, the actuating electrodes being borne partially by the stationary portion and partially by the movable portion, the actuating electrodes being commanded to automatically control positionwise the movement of the sensitive element; a mechanism commanding the actuating electrodes, which is configured, on the basis of signals emitted by the gauge, to bias the actuating electrodes to automatically control positionwise the movement of the sensitive element.
Public/Granted literature
- US20170363493A1 DYNAMIC PRESSURE SENSOR WITH IMPROVED OPERATION Public/Granted day:2017-12-21
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