Invention Grant
- Patent Title: Controlling opening angle of a resonating mirror
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Application No.: US15645259Application Date: 2017-07-10
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Publication No.: US10345577B2Publication Date: 2019-07-09
- Inventor: Mark Kolodkin
- Applicant: STMicroelectronics Ltd
- Applicant Address: IL Netanya
- Assignee: STMicroelectronics LTD
- Current Assignee: STMicroelectronics LTD
- Current Assignee Address: IL Netanya
- Agency: Crowe & Dunlevy
- Main IPC: G02B26/08
- IPC: G02B26/08

Abstract:
A device described herein includes a movable MEMS mirror, with a driver configured to drive the movable MEMS mirror with a periodic signal such that the MEMS mirror oscillates at its resonance frequency. A feedback measuring circuit is configured to measure a signal flowing through the movable MEMS mirror. A processor is configured to sample the signal at first and second instants, generate an error signal as a function of a difference between the signal at the first instant in time and the signal at the second instant in time, and determine the opening angle of the movable MEMS mirror as a function of the error signal.
Public/Granted literature
- US20170307873A1 CONTROLLING OPENING ANGLE OF A RESONATING MIRROR Public/Granted day:2017-10-26
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