Invention Grant
- Patent Title: Mask plates and manufacturing methods of array substrates
-
Application No.: US15541681Application Date: 2017-06-16
-
Publication No.: US10345697B2Publication Date: 2019-07-09
- Inventor: Dongzi Gao
- Applicant: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Applicant Address: CN Shenzhen, Guangdong
- Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd
- Current Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd
- Current Assignee Address: CN Shenzhen, Guangdong
- Agent Andrew C. Cheng
- Priority: CN201710325080 20170510
- International Application: PCT/CN2017/088614 WO 20170616
- International Announcement: WO2018/205345 WO 20181115
- Main IPC: G03F1/58
- IPC: G03F1/58 ; H01L27/12 ; H01L29/66 ; H01L21/027 ; H01L21/3213 ; H01L21/308 ; G02F1/13 ; G03F1/50 ; G03F7/26 ; G03F7/16 ; G03F7/20

Abstract:
The present disclosure relates to a mask plate and a manufacturing method of array substrates. The mask plate includes: at least two first sub-areas and at least one second sub-area. Wherein the first sub-areas are spaced apart from each other, and the first sub-areas are configured to be as semi-transparent areas, and a transmittance rate of the the second sub-area is greater than the first sub-area. When conducting an exposure process on a photoresist, a thickness of the exposed photoresist via the second sub-area is greater than a thickness of the exposed photoresist via the first sub-area. When manufacturing an array substrate, a channel of the array substrate corresponds to the second sub-area. The time for conducting the exposure process and an ashing process may be reduced by adopting the mask plate when manufacturing the array substrates.
Public/Granted literature
- US20180329287A1 MASK PLATES AND MANUFACTURING METHODS OF ARRAY SUBSTRATES Public/Granted day:2018-11-15
Information query