Mask cooling apparatus and mask cooling methods are provided. An exemplary mask cooling apparatus includes a cooler, having a cooling region, a coolant inlet region and a coolant outlet region; cooling channels, disposed in the cooling region of the cooler and used to contact with the mask; coolant inlet channels, disposed in the coolant inlet region and used to introduce a coolant in the cooling channels; and coolant outlet channels, disposed in the coolant outlet region and used to drain the coolant out from the cooling channels.