Invention Grant
- Patent Title: Product quality prediction method for mass customization
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Application No.: US15794011Application Date: 2017-10-26
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Publication No.: US10345794B2Publication Date: 2019-07-09
- Inventor: Chun-Fang Chen , Hao Tieng , Fan-Tien Cheng , Haw-Ching Yang
- Applicant: NATIONAL CHENG KUNG UNIVERSITY
- Applicant Address: TW Tainan
- Assignee: NATIONAL CHENG KUNG UNIVERSITY
- Current Assignee: NATIONAL CHENG KUNG UNIVERSITY
- Current Assignee Address: TW Tainan
- Agency: CKC & Partners Co., LLC
- Priority: TW105144278A 20161230
- Main IPC: G05B13/04
- IPC: G05B13/04 ; G05B19/418 ; H01L21/66 ; G05B19/042

Abstract:
A product quality prediction method for mass customization is provided. When a production system has a status change, data of sets of process parameters and actual measurement values of workpiece samples processed before the status change occurs, and data of sets of process parameters and actual measurement values of few workpiece samples processed after the status change occurs are used for build or retrain a prediction model, thereby predicting a metrology value of a next workpiece.
Public/Granted literature
- US20180188717A1 PRODUCT QUALITY PREDICTION METHOD FOR MASS CUSTOMIZATION Public/Granted day:2018-07-05
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