Invention Grant
- Patent Title: Dynamic temperature control of an ion source
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Application No.: US15847485Application Date: 2017-12-19
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Publication No.: US10347457B1Publication Date: 2019-07-09
- Inventor: Alexander S. Perel, Sr. , David P. Sporleder , Adam M. McLaughlin , Craig R. Chaney , Neil J. Bassom
- Applicant: Varian Semiconductor Equipment Associates, Inc.
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Agency: Nields, Lemack & Frame, LLC
- Main IPC: H01J37/02
- IPC: H01J37/02 ; H01J37/30

Abstract:
A system and method for varying the temperature of a faceplate for an ion source is disclosed. The faceplate is held against the chamber walls of the ion source by a plurality of fasteners. These fasteners may include tension springs or compression springs. By changing the length of the tension spring or compression spring when under load, the spring force of the spring can be increased. This increased spring force increases the compressive force between the faceplate and the chamber walls, creating improved thermal conductivity. In certain embodiments, the length of the spring is regulated by an electronic length adjuster. This electronic length adjuster is in communication with a controller that outputs an electrical signal indicative of the desired length of the spring. Various mechanisms for adjusting the length of the spring are disclosed.
Public/Granted literature
- US20190189387A1 Dynamic Temperature Control Of An Ion Source Public/Granted day:2019-06-20
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