Invention Grant
- Patent Title: Silicon carbide wafer and method for production thereof
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Application No.: US15842967Application Date: 2017-12-15
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Publication No.: US10347481B2Publication Date: 2019-07-09
- Inventor: Ching-Shan Lin , Jian-Hsin Lu , Chien-Cheng Liou , I-Ching Li
- Applicant: GLOBALWAFERS CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: GlobalWafers Co., Ltd.
- Current Assignee: GlobalWafers Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Osha Liang LLP
- Priority: TW106135711A 20171018
- Main IPC: H01L29/15
- IPC: H01L29/15 ; H01L21/02

Abstract:
A method for producing a silicon carbide wafer includes: providing a silicon carbide wafer having an unpolished surface; in which the unpolished surface has a first crystal face and a second crystal face; polishing one face of the first crystal face and the second crystal face of the unpolished surface in a first polishing solution by using a polisher; in which the polisher includes a polishing pad and a plurality of abrasive particles fixed on the polishing pad; and polishing the other face of the first crystal face and the second crystal face of the unpolished surface in a second polishing solution by using the polisher; in which a pH value of the first polishing solution is less than or equal to 7, and a pH value of the second polishing solution is greater than or equal to 7. The present disclosure also provides a silicon carbide wafer.
Public/Granted literature
- US20190115205A1 SILICON CARBIDE WAFER AND METHOD FOR PRODUCTION THEREOF Public/Granted day:2019-04-18
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