Invention Grant
- Patent Title: Molded cavity fanout package without using a carrier and method of manufacturing the same
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Application No.: US15940878Application Date: 2018-03-29
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Publication No.: US10347509B1Publication Date: 2019-07-09
- Inventor: Minghao Shen
- Applicant: DiDrew Technology (BVI) Limited
- Applicant Address: US CA Santa Clara
- Assignee: DIDREW TECHNOLOGY (BVI) LIMITED
- Current Assignee: DIDREW TECHNOLOGY (BVI) LIMITED
- Current Assignee Address: US CA Santa Clara
- Agency: LeClairRyan
- Main IPC: H01L21/56
- IPC: H01L21/56 ; H01L23/00 ; H01L23/29 ; H01L23/522 ; H01L21/768

Abstract:
Disclosed is a method of manufacturing a semiconductor device that includes molding and curing a framing member having an upper side that defines an array of indentations. Semiconductor dies are then adhered to the framing member within respective indentations. The upper side of the framing member and the dies are covered with an RDL. Formation of the RDL includes deposition of a dielectric material that also fills gaps between the dies and the framing member within the indentations. The framing member can be molded to have a thickness that can provide mechanical strength to resist damage to the dies during the formation of the RDL or other manufacturing processes, for example due to warping of the dies. After the RDL is completed, this excess framing member material can then be removed from lower side of the framing member and the structure can be diced to separate the dies into respective semiconductor devices.
Information query
IPC分类: