Invention Grant
- Patent Title: Method for manufacturing workpieces and apparatus
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Application No.: US14452883Application Date: 2014-08-06
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Publication No.: US10347515B2Publication Date: 2019-07-09
- Inventor: Bernd Heinz
- Applicant: Oerlikon Advanced Technologies AG
- Applicant Address: CH Trübbach
- Assignee: EVATEC AG
- Current Assignee: EVATEC AG
- Current Assignee Address: CH Trübbach
- Agency: Pearne & Gordon LLP
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/677 ; H01L21/687
Abstract:
For vacuum treatment of workpieces by a multitude of distinct processing stations (P11-P1n, P21-P2m) the processing stations are grouped in two groups (I and II). The workpieces are handled towards and from the processing stations of the first group (I) simultaneously, whereat the workpieces are treated by the processing stations of the second group (II) in a selectable individual sequence.
Public/Granted literature
- US20140345518A1 METHOD FOR MANUFACTURING WORKPIECES AND APPARATUS Public/Granted day:2014-11-27
Information query
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