- Patent Title: Receptacle device, device and method for handling substrate stacks
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Application No.: US15907637Application Date: 2018-02-28
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Publication No.: US10347523B2Publication Date: 2019-07-09
- Inventor: Erich Thallner , Friedrich Paul Lindner
- Applicant: EV GROUP E. THALLNER GMBH
- Applicant Address: AT St. Florian am Inn
- Assignee: EV GROUP E. THALLNER GMBH
- Current Assignee: EV GROUP E. THALLNER GMBH
- Current Assignee Address: AT St. Florian am Inn
- Agency: Kusner & Jaffe
- Main IPC: H01L21/68
- IPC: H01L21/68 ; B25J15/06 ; H01L21/687 ; H01L21/67

Abstract:
The invention relates to a retaining system for handling substrate stacks, including a retaining surface for retaining a first substrate, and one or more recesses provided relative to the retaining surface, for retaining first magnetic bodies for securing the first substrate relative to a second substrate that is aligned with the first substrate. Second magnetic bodies are applied on a holding side of the second substrate.
Public/Granted literature
- US20180190536A1 RECEPTACLE DEVICE, DEVICE AND METHOD FOR HANDLING SUBSTRATE STACKS Public/Granted day:2018-07-05
Information query
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