Invention Grant
- Patent Title: Semi-sequential 3D integration
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Application No.: US16203605Application Date: 2018-11-28
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Publication No.: US10347536B2Publication Date: 2019-07-09
- Inventor: Amey Mahadev Walke , Nadine Collaert
- Applicant: IMEC VZW
- Applicant Address: BE Leuven
- Assignee: IMEC VZW
- Current Assignee: IMEC VZW
- Current Assignee Address: BE Leuven
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Priority: EP16187075 20160902
- Main IPC: H01L21/822
- IPC: H01L21/822 ; H01L21/8238 ; H01L27/06 ; H01L27/092 ; H01L23/535 ; H01L21/84 ; H01L27/088 ; H01L27/12 ; H01L27/02

Abstract:
Disclosed herein is a semiconductor structure including: a host substrate and one or more bonding layers on top of the host substrate. The structure further includes an entity on the one or more bonding layers, where the entity includes two transistors on opposite sides of a common layer of channel material, where each transistor includes a gate, where both gates overlap each other, where both transistors share the same source and drain regions, and where each transistor have a channel defined within a same portion of the common layer of channel material overlapped by both transistor gates.
Public/Granted literature
- US20190096764A1 Semi-sequential 3D Integration Public/Granted day:2019-03-28
Information query
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