Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US16058210Application Date: 2018-08-08
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Publication No.: US10347650B1Publication Date: 2019-07-09
- Inventor: Kiwamu Sakuma , Kensuke Ota , Masumi Saitoh
- Applicant: TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Minato-ku
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2018-052175 20180320
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L27/11573 ; H01L27/11582 ; H01L27/24 ; H01L29/786 ; H01L29/04 ; H01L29/423

Abstract:
A semiconductor memory device includes: a substrate; a memory cell array including memory cells arranged in a first direction intersecting a surface of the substrate; an insulating layer covering the memory cell array; and a transistor provided on the insulating layer. The transistor includes: first and second semiconductor layers provided on the insulating layer; a gate electrode provided between the first and second semiconductor layers, one end in the first direction of the gate electrode being closer to the substrate than the first and second semiconductor layers; a gate insulating film provided on the one end and on side surfaces of the gate electrode; and a third semiconductor layer facing the one end and the side surfaces of the gate electrode. The third semiconductor layer includes a crystal grain larger than a shortest distance between the insulating layer and the gate insulating film.
Information query
IPC分类: