Invention Grant
- Patent Title: Semiconductor device with high integration
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Application No.: US15687131Application Date: 2017-08-25
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Publication No.: US10347651B2Publication Date: 2019-07-09
- Inventor: Young Jin Lee
- Applicant: SK hynix Inc.
- Applicant Address: KR Gyeonggi-do
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2015-0103965 20150722
- Main IPC: H01L27/11556
- IPC: H01L27/11556 ; H01L27/11582 ; H01L27/11565

Abstract:
The present disclosure may provide a semiconductor device having a stable structure and a low manufacturing degree of the difficulty. The device may include conductive layers and insulating layers which are alternately stacked; a plurality of pillars passing through the conductive layers and the insulating layers; and a plurality of deposition inhibiting patterns, each deposition inhibiting pattern being formed along a portion of an interface between a side-wall of each of the pillars and each of the conductive layers and along a portion of an interface between each of the insulating layers and each of the conductive layers.
Public/Granted literature
- US20170352682A1 SEMICONDUCTOR DEVICE WITH HIGH INTEGRATION Public/Granted day:2017-12-07
Information query
IPC分类: