Invention Grant
- Patent Title: Method for fabricating a TFT backplane and TFT backplane
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Application No.: US15532493Application Date: 2017-05-12
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Publication No.: US10347666B2Publication Date: 2019-07-09
- Inventor: Xingyu Zhou
- Applicant: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Applicant Address: CN Shenzhen, Guangdong
- Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Current Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Current Assignee Address: CN Shenzhen, Guangdong
- Agent Andrew C. Cheng
- Priority: CN201710203707 20170330
- International Application: PCT/CN2017/084135 WO 20170512
- International Announcement: WO2018/176589 WO 20181004
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/51 ; H01L27/32 ; H01L51/56 ; H01L51/05

Abstract:
The present application discloses a method for fabricating a TFT backplane and a TFT backplane. The method includes: providing a substrate; subsequently forming a first active region, a first oxide layer, a nitride layer and a first and a second gate independently of each other on the substrate; removing the nitride layer not covered by the first and second gate electrodes; depositing a second insulating layer; forming a second active region with different material from the first active region on the on the second insulating layer above the second gate electrode; forming a first and a second source electrodes, a first and a second drain electrodes respectively. This method can improve the performance of the TFT backplane.
Public/Granted literature
- US20190096973A1 METHOD FOR FABRICATING A TFT BACKPLANE AND TFT BACKPLANE Public/Granted day:2019-03-28
Information query
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