Invention Grant
- Patent Title: Vertical FET structure
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Application No.: US15964487Application Date: 2018-04-27
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Publication No.: US10347759B2Publication Date: 2019-07-09
- Inventor: Brent A. Anderson , Huiming Bu , Fee Li Lie , Edward J. Nowak , Junli Wang
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L27/088 ; H01L21/8234 ; H01L29/66 ; H01L29/08

Abstract:
Techniques relate to forming a vertical field effect transistor (FET). One or more fins are formed on a bottom source or drain of a substrate, and one or more fins extend in a vertical direction. Gate material is formed to be positioned on sides of the one or more fins. Gate encapsulation material is formed on sides of the gate material to form a trench, such that top portions of the one or more fins are exposed in the trench. A top source or drain is formed on top of the one or more fins such that the top source or drain is laterally confined by the trench in a lateral direction that is parallel to the one or more fins.
Public/Granted literature
- US20180248037A1 VERTICAL FET STRUCTURE Public/Granted day:2018-08-30
Information query
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