Invention Grant
- Patent Title: STT-MRAM flip-chip magnetic shielding and method for producing the same
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Application No.: US15864741Application Date: 2018-01-08
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Publication No.: US10347826B1Publication Date: 2019-07-09
- Inventor: Bharat Bhushan , Juan Boon Tan , Danny Pak-Chum Shum , Wanbing Yi
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Ditthavong & Steiner, P. C.
- Main IPC: H01L43/12
- IPC: H01L43/12 ; H01L43/02 ; H01L27/22

Abstract:
Methods of magnetically shielding a perpendicular STT-MRAM structure on all six sides within a flip-chip package and the resulting devices are provided. Embodiments include forming a passivation stack over an upper surface of a wafer and outer portions of an Al pad; forming a polymer layer over the passivation stack; forming a UBM layer over the Al pad, portions of the polymer layer and along sidewalls of the polymer layer; forming a T-shaped Cu pillar over the UBM layer; forming a μ-bump over the T-shaped Cu pillar; dicing the wafer into a plurality of dies; forming an epoxy layer over a bottom surface of each die; forming a magnetic shielding layer over the epoxy layer and along sidewalls of each die, the epoxy layer, the passivation stack and the polymer layer; and connecting the μ-bump to a package substrate with a BGA balls.
Public/Granted literature
- US20190214550A1 STT-MRAM FLIP-CHIP MAGNETIC SHIELDING AND METHOD FOR PRODUCING THE SAME Public/Granted day:2019-07-11
Information query
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