Invention Grant
- Patent Title: Resistive random access memory and fabrication method thereof
-
Application No.: US15263918Application Date: 2016-09-13
-
Publication No.: US10347833B2Publication Date: 2019-07-09
- Inventor: Lihong Xiao
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation , Semiconductor Manufacturing International (Beijing) Corporation
- Applicant Address: CN Shanghai CN Beijing
- Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION,SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
- Current Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION,SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
- Current Assignee Address: CN Shanghai CN Beijing
- Agency: Anova Law Group, PLLC
- Priority: CN201510631712 20150929
- Main IPC: H01L45/00
- IPC: H01L45/00

Abstract:
The present disclosure provides resistive random access memory and fabrication methods thereof. An exemplary fabrication method of the resistive random access memory includes providing a substrate; forming a bottom electrode on the substrate; forming a resistance switching layer on the bottom electrode; forming a barrier on the resistance switching layer; and forming a top electrode on the barrier layer. The barrier is used to prevent atoms in the top electrode from diffusing into the resistance switching layer.
Public/Granted literature
- US20170092854A1 RESISTIVE RANDOM ACCESS MEMORY AND FABRICATION METHOD THEREOF Public/Granted day:2017-03-30
Information query
IPC分类: