Impedance matching device
Abstract:
An impedance matching device comprising a variable reactor having a main winding and control winding, wherein a generated magnet field in the core is an AC magnetic field with a magnitude exceeding a value to settle a deviation between a control target value for impedance matching and a feedback value, by changing the magnitude of the generated magnetic field by changing a control current passing through the control winding, thereby controlling inductance of the variable rector to be a predetermined value to perform impedance matching, the response delay in the impedance matching is reduced by reducing a response delay in the inductance variation of the variable reactor.
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