- Patent Title: Piezoelectric element, probe, and ultrasonic measurement apparatus
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Application No.: US15283367Application Date: 2016-10-01
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Publication No.: US10363574B2Publication Date: 2019-07-30
- Inventor: Hiromu Miyazawa , Hiroshi Ito , Tomoaki Nakamura , Masayoshi Yamada , Jiro Tsuruno , Tsukasa Funasaka
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Maschoff Brennan
- Priority: JP2015-196762 20151002
- Main IPC: H01L41/09
- IPC: H01L41/09 ; H01L41/047 ; B06B1/06 ; A61B8/00 ; G01N29/24
Abstract:
A piezoelectric element which includes a vibrating film, a piezoelectric body disposed on one surface of the vibrating film, and a horizontal electrode structure in which electrodes are disposed at a predetermined gap therebetween on the piezoelectric body. The vibrating film includes a recess portion in a portion corresponding to the predetermined gap in plan view.
Public/Granted literature
- US20170095837A1 PIEZOELECTRIC ELEMENT, PROBE, AND ULTRASONIC MEASUREMENT APPARATUS Public/Granted day:2017-04-06
Information query
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