- Patent Title: Compound, resin, material for forming underlayer film for lithography, composition for forming underlayer film for lithography, underlayer film for lithography, resist pattern forming method, circuit pattern forming method, and purification method
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Application No.: US15746107Application Date: 2016-07-15
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Publication No.: US10364314B2Publication Date: 2019-07-30
- Inventor: Kana Okada , Junya Horiuchi , Takashi Makinoshima , Masatoshi Echigo
- Applicant: Mitsubishi Gas Chemical Company, Inc.
- Applicant Address: JP Tokyo
- Assignee: Mitsubishi Gas Chemical Company, Inc.
- Current Assignee: Mitsubishi Gas Chemical Company, Inc.
- Current Assignee Address: JP Tokyo
- Agency: Fitch, Even, Tabin & Flannery LLP
- Priority: JP2015-145010 20150722
- International Application: PCT/JP2016/071018 WO 20160715
- International Announcement: WO2017/014191 WO 20170126
- Main IPC: C08G8/36
- IPC: C08G8/36 ; C08G16/00 ; C08G16/02 ; C09D161/00 ; C07D233/64 ; C07D405/04 ; G03F7/11 ; G03F7/039 ; G03F7/16 ; G03F7/20 ; G03F7/32 ; H01L21/308 ; H01L21/027 ; G03F7/26 ; G03F7/38 ; C07B63/04

Abstract:
A compound or a resin represented by the following formula (1). (in formula (1), each X independently represents an oxygen atom, a sulfur atom, or an uncrosslinked state, each R1 is independently selected from the group consisting of a halogen group, a cyano group, a nitro group, an amino group, a hydroxyl group, a thiol group, a heterocyclic group, an alkyl group having 1 to 30 carbon atoms, an alkenyl group having 2 to 30 carbon atoms, an aryl group having 6 to 40 carbon atoms, and combinations thereof, in which the alkyl group, the alkenyl group and the aryl group optionally include an ether bond, a ketone bond or an ester bond, each R2 independently represents an alkyl group having 1 to 30 carbon atoms, an aryl group having 6 to 40 carbon atoms, an alkenyl group having 2 to 30 carbon atoms, a thiol group or a hydroxyl group, in which at least one R2 represents a group including a hydroxyl group or a thiol group, each m is independently an integer of 0 to 7 (in which at least one m is an integer of 1 to 7.), each p is independently 0 or 1, q is an integer of 0 to 2, and n is 1 or 2).
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