Invention Grant
- Patent Title: Substrate processing apparatus
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Application No.: US15289899Application Date: 2016-10-10
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Publication No.: US10364494B2Publication Date: 2019-07-30
- Inventor: Cha Young Yoo , Sung Tae Je , Kyu Jin Choi , Ja Dae Ku , Jun Kim , Bong Ju Jung , Kyung Seok Park , Yong Ki Kim , Jae Woo Kim
- Applicant: EUGENE TECHNOLOGY CO., LTD.
- Applicant Address: KR
- Assignee: EUGENE TECHNOLOGY CO., LTD.
- Current Assignee: EUGENE TECHNOLOGY CO., LTD.
- Current Assignee Address: KR
- Agency: Renaissance IP Law Group LLP
- Priority: KR10-2015-0187865 20151228
- Main IPC: C23C16/40
- IPC: C23C16/40 ; C23C16/455 ; C23C16/458 ; C23C16/46 ; C23C16/52 ; C30B25/10 ; C30B29/06 ; H01L21/67

Abstract:
The present disclosure relates to a substrate processing apparatus, and more particularly, a substrate processing apparatus that is capable of improving process uniformity on an entire surface of a substrate. The substrate processing apparatus includes a substrate boat in which a substrate is loaded, a reaction tube in which a processing process for the substrate loaded in the substrate boat is performed, a gas supply unit configured to supply a process gas into the reaction tube through an injection nozzle disposed on one side of the reaction tube, a heating unit including a plurality of vertical heating parts, which are disposed along a circumference of the reaction tube outside the reaction tube and configured to divide the circumference to the reaction tube into a plurality of portions so as to independently heat each of the divided portions of the reaction tube, and a control unit configured to control the heating unit.
Public/Granted literature
- US20170183771A1 SUBSTRATE PROCESSING APPARATUS Public/Granted day:2017-06-29
Information query
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