Invention Grant
- Patent Title: Method for producing a thin film
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Application No.: US15483110Application Date: 2017-04-10
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Publication No.: US10364495B2Publication Date: 2019-07-30
- Inventor: Tomoharu Yoshino , Atsushi Sakurai , Tsubasa Shiratori , Masako Hatase , Hiroyuki Uchiuzou , Akihiro Nishida
- Applicant: ADEKA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: ADEKA CORPORATION
- Current Assignee: ADEKA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Young & Thompson
- Priority: JP2012-281457 20121225
- Main IPC: C23C16/44
- IPC: C23C16/44 ; C23C16/455 ; C07F5/06 ; C23C16/40 ; C23C16/06

Abstract:
The present invention relates to an aluminum compound represented by general formula (I). The present invention also relates to a thin film-forming raw material that contains this aluminum compound. In general formula (I), R1 and R2 each independently denote a straight chain or branched alkyl group having 2-5 carbon atoms, and R3 denotes a methyl group or ethyl group. It is preferable for R1 and R2 to be ethyl groups. This compound has a low melting point, exhibits satisfactory volatility, has high thermal stability, and is suitable for use as a raw material used to form a thin film by a CVD method.
Public/Granted literature
- US20170211184A1 METHOD FOR PRODUCING A THIN FILM Public/Granted day:2017-07-27
Information query
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