Invention Grant
- Patent Title: Gas supply pipe, and gas treatment equipment
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Application No.: US14643165Application Date: 2015-03-10
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Publication No.: US10364498B2Publication Date: 2019-07-30
- Inventor: Takahiro Terada , Takuya Matsuda , Kaori Deura , Masayuki Tanaka , Aya Watase
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Minato-ku
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2014-073604 20140331
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C16/458 ; C30B25/14 ; C30B31/16 ; H01J37/32

Abstract:
According to one embodiment, a gas supply pipe has a first gas pipe configured to blow a gas which has flowed from an inflow opening via first gas blow holes arranged along a longitudinal direction, and a second gas pipe provided in parallel with the first gas pipe. The second gas pipe has second gas blow holes arranged along the longitudinal direction, and allows the gas to flow in a direction opposite to the first gas pipe.
Public/Granted literature
- US20150275369A1 GAS SUPPLY PIPE, AND GAS TREATMENT EQUIPMENT Public/Granted day:2015-10-01
Information query
IPC分类: