Invention Grant
- Patent Title: Dynamic modulation of cross flow manifold during elecroplating
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Application No.: US15225716Application Date: 2016-08-01
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Publication No.: US10364505B2Publication Date: 2019-07-30
- Inventor: Kari Thorkelsson , Aaron Berke , Bryan L. Buckalew , Steven T. Mayer
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: C25D5/08
- IPC: C25D5/08 ; C25D17/00 ; C25D7/12 ; C25D17/06 ; C25D21/10 ; C25D5/04 ; C25D21/12 ; C25D5/18 ; C25D5/02 ; C25D5/10

Abstract:
The embodiments herein relate to methods and apparatus for electroplating one or more materials onto a substrate. Typically, the embodiments herein utilize a channeled plate positioned near the substrate, creating a cross flow manifold between the channeled plate and substrate, and on the sides by a flow confinement ring. A seal may be provided between the bottom surface of a substrate holder and the top surface of an element below the substrate holder (e.g., the flow confinement ring). During plating, fluid enters the cross flow manifold through channels in the channeled plate, and through a cross flow inlet, then exits at the cross flow exit, positioned opposite the cross flow inlet. The apparatus may switch between a sealed state and an unsealed state during electroplating, for example by lowering and lifting the substrate and substrate holder as appropriate to engage and disengage the seal.
Public/Granted literature
- US20170342583A1 DYNAMIC MODULATION OF CROSS FLOW MANIFOLD DURING ELECROPLATING Public/Granted day:2017-11-30
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