Invention Grant
- Patent Title: Fluid control device
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Application No.: US15641068Application Date: 2017-07-03
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Publication No.: US10364910B2Publication Date: 2019-07-30
- Inventor: Yung-Lung Han , Chi-Feng Huang
- Applicant: Microjet Technology Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: MICROJET TECHNOLOGY CO., LTD.
- Current Assignee: MICROJET TECHNOLOGY CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: TW105128595A 20160905
- Main IPC: F04B43/04
- IPC: F04B43/04 ; F16K31/00 ; F16K31/02 ; H01L41/04 ; B41J2/16 ; B41J2/175 ; F04B43/00 ; F04B45/04 ; F04B45/047 ; F04B53/22 ; H01L41/00

Abstract:
A fluid control device includes a piezoelectric actuator and a deformable substrate. The piezoelectric actuator includes a piezoelectric element and a vibration plate. The piezoelectric element is attached on a surface of the vibration plate. The piezoelectric element is subjected to deformation in response to an applied voltage. The vibration plate is subjected to a curvy vibration in response to the deformation of the piezoelectric element. The deformable substrate includes a flexible plate and a communication plate, which are stacked on each other. Consequently, a synchronously-deformed structure is defined by the flexible plate and the communication plate collaboratively. There is a specified depth between the flexible plate and the vibration plate. The flexible plate includes a movable part corresponding to the vibration plate.
Public/Granted literature
- US20180066762A1 FLUID CONTROL DEVICE Public/Granted day:2018-03-08
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