Invention Grant
- Patent Title: Gas sensor
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Application No.: US15079840Application Date: 2016-03-24
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Publication No.: US10365208B2Publication Date: 2019-07-30
- Inventor: Stefan Kolb , Alfons Dehe , Jochen Huber , Franz Jost , Horst Theuss , Wilhelm Wiedmeier , Juergen Woellenstein
- Applicant: Infineon Technologies AG , Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.
- Applicant Address: DE Neubiberg DE Munich
- Assignee: Infineon Technologies AG,Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.
- Current Assignee: Infineon Technologies AG,Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.
- Current Assignee Address: DE Neubiberg DE Munich
- Agency: Eschweiler & Potashnik, LLC
- Priority: DE202015002315U 20150327
- Main IPC: G01N21/17
- IPC: G01N21/17 ; G01N29/02 ; G01N29/24 ; G01N29/30
Abstract:
Shown is a gas sensor including a sensor element, a measurement chamber and an emitter element. The sensor element has a MEMS membrane which is arranged in a first substrate region. Furthermore, the measurement chamber is embodied to receive a measurement gas.
Public/Granted literature
- US20160282259A1 GAS SENSOR Public/Granted day:2016-09-29
Information query
