An article is described comprising a substrate and a plurality of layers deposited by layer-by-layer self-assembly disposed on the substrate. A portion of the layers comprise inorganic oxide nanoparticles comprising a phosphorous-containing surface treatment. Also described is an article comprising a bi-layer, the bi-layer comprises a monolayer of a polycation and a monolayer of a polyanion. The polyanion comprises inorganic oxide nanoparticles comprising a phosphorous-containing surface treatment. The polycations may be a polyelectrolyte or inorganic oxide nanoparticles.