Invention Grant
- Patent Title: Wiring structure for display device
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Application No.: US14241600Application Date: 2012-09-03
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Publication No.: US10365520B2Publication Date: 2019-07-30
- Inventor: Hiroyuki Okuno , Toshihiro Kugimiya
- Applicant: Hiroyuki Okuno , Toshihiro Kugimiya
- Applicant Address: JP Kobe-shi
- Assignee: Kobe Steel, Ltd.
- Current Assignee: Kobe Steel, Ltd.
- Current Assignee Address: JP Kobe-shi
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2011-213506 20110928; JP2012-166391 20120726
- International Application: PCT/JP2012/072339 WO 20120903
- International Announcement: WO2013/047095 WO 20130404
- Main IPC: H01L23/532
- IPC: H01L23/532 ; G02F1/1343 ; C22C21/00 ; H01J31/12 ; H01J11/46 ; H01L27/12 ; B32B15/01 ; C23C14/06 ; H01L21/48 ; G02F1/1362 ; C23C14/00 ; C23C14/02 ; C22C14/00 ; C22C27/02 ; C22C27/04

Abstract:
Provided is a wiring structure for display device which does not generate hillocks even when exposed to high temperatures at levels around 450 to 600° C., has excellent high-temperature heat resistance, keeps electrical resistance (wiring resistance) of the entire wiring structure low, and further has excellent resistance to hydrofluoric acid. This wiring structure for a display device comprises a structure in which are laminated, in order from the substrate side, a first layer of an Al alloy that contains at least one chemical element selected from the group (group X) consisting of Ta, Nb, Re, Zr, W, Mo, V, Hf, Ti, Cr, and Pt and contains at least one rare earth element, and a second layer of an Al alloy nitride, or a nitride of at least one chemical element selected from the group Y consisted of Ti, Mo, Al, Ta, Nb, Re, Zr, W, V, Hf, and Cr.
Public/Granted literature
- US20140227462A1 WIRING STRUCTURE FOR DISPLAY DEVICE Public/Granted day:2014-08-14
Information query
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