Invention Grant
- Patent Title: Active feedback control of subsystems of a process module
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Application No.: US15818590Application Date: 2017-11-20
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Publication No.: US10366869B2Publication Date: 2019-07-30
- Inventor: Scott Riggs , Ryan Bise , John Valcore , Eric Hudson , Ranadeep Bhowmick
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Penilla IP, APC
- Main IPC: H01J37/32
- IPC: H01J37/32 ; G06F1/12 ; G06F1/08

Abstract:
A communications system for synchronizing control signals between subsystems coupled to a process module used for processing a substrate. A distributed controller coupled to the subsystems is configured to initiate process steps, each step having a step period. A distributed clock module includes a master clock having a clock speed including clock cycles, each clock cycle having a duration that is pre-correlated to a feedback loop within which synchronized control signals are delivered to and received from the subsystems by the distributed clock module. A predefined number of clock cycles is assigned by the distributed clock module for performing a corresponding number of feedback loops for transitioning between process steps. The predefined number of clock cycles are restricted to a fraction of the step period.
Public/Granted literature
- US20190157039A1 ACTIVE FEEDBACK CONTROL OF SUBSYSTEMS OF A PROCESS MODULE Public/Granted day:2019-05-23
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