Invention Grant
- Patent Title: Chip bonding apparatus, chip bonding method and a chip package structure
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Application No.: US15856065Application Date: 2017-12-28
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Publication No.: US10366965B2Publication Date: 2019-07-30
- Inventor: Shu-Wei Kuo , Wei-Yuan Cheng , Shau-Fei Cheng
- Applicant: Industrial Technology Research Institute , Intellectual Property Innovation Corporation
- Applicant Address: TW Hsinchu TW Hsinchu
- Assignee: Industrial Technology Research Institute,Intellectual Property Innovation Corporation
- Current Assignee: Industrial Technology Research Institute,Intellectual Property Innovation Corporation
- Current Assignee Address: TW Hsinchu TW Hsinchu
- Agency: JCIPRNET
- Priority: TW106137307A 20171030
- Main IPC: H01L23/495
- IPC: H01L23/495 ; H01L23/00 ; H01L23/498 ; H01L23/544 ; H01L21/67 ; H01L21/48 ; H01L23/31

Abstract:
A chip bonding apparatus for bonding a chip and a redistribution structure with each other is provided. The chip bonding apparatus includes a pick and place module and an alignment module. The pick and place module is suitable for picking up and placing the chip. The alignment module is movably connected to the pick and place module. The alignment module includes at least one alignment protrusion, wherein the at least one alignment protrusion extends toward at least one alignment socket included in the redistribution structure. Furthermore, a chip bonding method and a chip package structure are provided.
Public/Granted literature
- US20190131271A1 CHIP BONDING APPARATUS, CHIP BONDING METHOD AND A CHIP PACKAGE STRUCTURE Public/Granted day:2019-05-02
Information query
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